Shortcourse: Process Integration    
 

Lesson	Discussion Topic	Lecture Documents	Reference Documents
	Introduction	Outline.pdf
1.	Review of Device and Process Technology	REVIEW.pdf	Calculations.xls
2.	Advanced MOSFET Basics	MOSFET_Basics.pdf
3.	Advanced CMOS Technology Parts 1	ADV_CMOS_Part 1.pdf
4.	Advanced CMOS Technology Part 3	ADV_CMOS_Part3.pdf
5.	Calculations for CMOS Processes	CMOS_Calculations.pdf
6.	Deep Submicrometer Scaling	250nmProcessDesign.pdf
7.	Lithography	Lithography-ASML.pdf
8.	CMOS Process Integration	CMOSProcessIntegration.pdf
9.	Introduction to TCAD	TCAD-SILVACO.pdf
10.	RIT's 100nm CMOS Process Simulation	100nmProcessSimulation.pdf
11.	RIT's 100nm CMOS Process Crossections	100nmCMOS_Xsection.pdf
12.	Testing Device Problem Analysis	Device Test.pdf
13.	Defects, Yield and Reliability	Reliability.pdf Defects.pdf
14.	Back End Processes	Back_End.pdf	Gas_Flow.wmv